2/8/2012	9:41:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	9:41:25 AM	Recipe started at 9:41 AM
2/8/2012	9:41:25 AM	Helium valve closed
2/8/2012	9:41:26 AM	H2 valve closed
2/8/2012	9:41:26 AM	BCl3 valve closed
2/8/2012	9:41:26 AM	PH3 valve closed
2/8/2012	9:41:26 AM	SiCl4 pre valve closed
2/8/2012	9:41:26 AM	SiCl4 post valve closed
2/8/2012	9:41:26 AM	Main Vac valve closed
2/8/2012	9:41:26 AM	Bypass valve closed
2/8/2012	9:41:26 AM	Bubbler valve closed
2/8/2012	9:41:26 AM	Helium MFC set to  0.000000
2/8/2012	9:41:26 AM	H2 MFC set to  0.000000
2/8/2012	9:41:26 AM	BCl3 MFC set to  0.000000
2/8/2012	9:41:26 AM	PH3 MFC set to  0.000000
2/8/2012	9:41:26 AM	SiCl4 MFC set to  0.000000
2/8/2012	9:41:26 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	9:41:26 AM	Tube furnace set to 0
2/8/2012	9:41:29 AM	H2 valve closed
2/8/2012	9:41:29 AM	BCl3 valve closed
2/8/2012	9:41:29 AM	PH3 valve closed
2/8/2012	9:41:29 AM	SiCl4 pre valve closed
2/8/2012	9:41:29 AM	SiCl4 post valve closed
2/8/2012	9:41:29 AM	Main Vac valve closed
2/8/2012	9:41:29 AM	Bypass valve closed
2/8/2012	9:41:29 AM	Bubbler valve closed
2/8/2012	9:41:29 AM	Helium valve opened
2/8/2012	9:41:29 AM	Helium MFC set to  500.000000
2/8/2012	9:41:29 AM	H2 MFC set to  0.000000
2/8/2012	9:41:29 AM	BCl3 MFC set to  0.000000
2/8/2012	9:41:29 AM	PH3 MFC set to  0.000000
2/8/2012	9:41:29 AM	SiCl4 MFC set to  0.000000
2/8/2012	9:41:29 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	9:41:29 AM	Tube furnace set to 0
2/8/2012	9:42:34 AM	Helium valve closed
2/8/2012	9:42:34 AM	H2 valve closed
2/8/2012	9:42:34 AM	BCl3 valve closed
2/8/2012	9:42:34 AM	PH3 valve closed
2/8/2012	9:42:34 AM	SiCl4 pre valve closed
2/8/2012	9:42:34 AM	SiCl4 post valve closed
2/8/2012	9:42:34 AM	Main Vac valve closed
2/8/2012	9:42:34 AM	Bypass valve closed
2/8/2012	9:42:34 AM	Bubbler valve closed
2/8/2012	9:42:34 AM	Helium MFC set to  0.000000
2/8/2012	9:42:34 AM	H2 MFC set to  0.000000
2/8/2012	9:42:34 AM	BCl3 MFC set to  0.000000
2/8/2012	9:42:34 AM	PH3 MFC set to  0.000000
2/8/2012	9:42:34 AM	SiCl4 MFC set to  0.000000
2/8/2012	9:42:34 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	9:42:34 AM	Tube furnace set to 0
2/8/2012	9:42:35 AM	Run finished at 9:42 AM
2/8/2012	9:42:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	9:46:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2012	9:46:30 AM	Recipe started at 9:46 AM
2/8/2012	9:46:30 AM	Helium valve closed
2/8/2012	9:46:31 AM	H2 valve closed
2/8/2012	9:46:31 AM	BCl3 valve closed
2/8/2012	9:46:31 AM	PH3 valve closed
2/8/2012	9:46:31 AM	SiCl4 pre valve closed
2/8/2012	9:46:31 AM	SiCl4 post valve closed
2/8/2012	9:46:31 AM	Main Vac valve closed
2/8/2012	9:46:31 AM	Bubbler valve closed
2/8/2012	9:46:31 AM	Bypass valve opened
2/8/2012	9:46:31 AM	Helium MFC set to  0.000000
2/8/2012	9:46:31 AM	H2 MFC set to  0.000000
2/8/2012	9:46:31 AM	BCl3 MFC set to  0.000000
2/8/2012	9:46:31 AM	PH3 MFC set to  0.000000
2/8/2012	9:46:31 AM	SiCl4 MFC set to  0.000000
2/8/2012	9:46:31 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	9:46:31 AM	Tube furnace set to 0
2/8/2012	9:47:28 AM	Helium valve closed
2/8/2012	9:47:28 AM	H2 valve closed
2/8/2012	9:47:28 AM	BCl3 valve closed
2/8/2012	9:47:28 AM	PH3 valve closed
2/8/2012	9:47:28 AM	SiCl4 pre valve closed
2/8/2012	9:47:28 AM	SiCl4 post valve closed
2/8/2012	9:47:28 AM	Main Vac valve closed
2/8/2012	9:47:28 AM	Bubbler valve closed
2/8/2012	9:47:28 AM	Bypass valve opened
2/8/2012	9:47:28 AM	Helium MFC set to  0.000000
2/8/2012	9:47:28 AM	H2 MFC set to  0.000000
2/8/2012	9:47:28 AM	BCl3 MFC set to  0.000000
2/8/2012	9:47:28 AM	PH3 MFC set to  0.000000
2/8/2012	9:47:28 AM	SiCl4 MFC set to  0.000000
2/8/2012	9:47:28 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	9:47:28 AM	Tube furnace set to 0
2/8/2012	9:48:28 AM	Helium valve closed
2/8/2012	9:48:28 AM	H2 valve closed
2/8/2012	9:48:28 AM	BCl3 valve closed
2/8/2012	9:48:28 AM	PH3 valve closed
2/8/2012	9:48:28 AM	SiCl4 pre valve closed
2/8/2012	9:48:28 AM	SiCl4 post valve closed
2/8/2012	9:48:28 AM	Bypass valve closed
2/8/2012	9:48:28 AM	Bubbler valve closed
2/8/2012	9:48:28 AM	Main Vac valve opened
2/8/2012	9:48:28 AM	Helium MFC set to  0.000000
2/8/2012	9:48:28 AM	H2 MFC set to  0.000000
2/8/2012	9:48:28 AM	BCl3 MFC set to  0.000000
2/8/2012	9:48:28 AM	PH3 MFC set to  0.000000
2/8/2012	9:48:28 AM	SiCl4 MFC set to  0.000000
2/8/2012	9:48:28 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	9:48:28 AM	Tube furnace set to 0
2/8/2012	9:48:29 AM	Run finished at 9:48 AM
2/8/2012	9:48:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2012	11:14:06 AM	Main Vac valve closed
2/8/2012	11:14:30 AM	Main Vac valve opened
2/8/2012	11:14:59 AM	Recipe started at 11:14 AM
2/8/2012	11:14:59 AM	Helium valve closed
2/8/2012	11:14:59 AM	H2 valve closed
2/8/2012	11:14:59 AM	BCl3 valve closed
2/8/2012	11:14:59 AM	PH3 valve closed
2/8/2012	11:14:59 AM	SiCl4 pre valve closed
2/8/2012	11:14:59 AM	SiCl4 post valve closed
2/8/2012	11:14:59 AM	Main Vac valve closed
2/8/2012	11:14:59 AM	Bypass valve closed
2/8/2012	11:14:59 AM	Bubbler valve closed
2/8/2012	11:14:59 AM	Helium MFC set to  0.000000
2/8/2012	11:14:59 AM	H2 MFC set to  0.000000
2/8/2012	11:14:59 AM	BCl3 MFC set to  0.000000
2/8/2012	11:14:59 AM	PH3 MFC set to  0.000000
2/8/2012	11:14:59 AM	SiCl4 MFC set to  0.000000
2/8/2012	11:14:59 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	11:14:59 AM	Tube furnace set to 0
2/8/2012	11:15:02 AM	Helium valve closed
2/8/2012	11:15:02 AM	BCl3 valve closed
2/8/2012	11:15:02 AM	PH3 valve closed
2/8/2012	11:15:02 AM	SiCl4 pre valve closed
2/8/2012	11:15:02 AM	SiCl4 post valve closed
2/8/2012	11:15:02 AM	Main Vac valve closed
2/8/2012	11:15:02 AM	Bypass valve closed
2/8/2012	11:15:02 AM	Bubbler valve closed
2/8/2012	11:15:02 AM	H2 valve opened
2/8/2012	11:15:02 AM	Helium MFC set to  0.000000
2/8/2012	11:15:02 AM	H2 MFC set to  500.000000
2/8/2012	11:15:02 AM	BCl3 MFC set to  0.000000
2/8/2012	11:15:02 AM	PH3 MFC set to  0.000000
2/8/2012	11:15:02 AM	SiCl4 MFC set to  0.000000
2/8/2012	11:15:02 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	11:15:02 AM	Tube furnace set to 0
2/8/2012	11:16:10 AM	Helium valve closed
2/8/2012	11:16:10 AM	BCl3 valve closed
2/8/2012	11:16:10 AM	PH3 valve closed
2/8/2012	11:16:10 AM	SiCl4 pre valve closed
2/8/2012	11:16:10 AM	SiCl4 post valve closed
2/8/2012	11:16:10 AM	Main Vac valve closed
2/8/2012	11:16:10 AM	Bypass valve closed
2/8/2012	11:16:10 AM	H2 valve opened
2/8/2012	11:16:10 AM	Bubbler valve opened
2/8/2012	11:16:10 AM	Helium MFC set to  0.000000
2/8/2012	11:16:10 AM	H2 MFC set to  500.000000
2/8/2012	11:16:10 AM	BCl3 MFC set to  0.000000
2/8/2012	11:16:10 AM	PH3 MFC set to  0.000000
2/8/2012	11:16:10 AM	SiCl4 MFC set to  0.000000
2/8/2012	11:16:10 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	11:16:10 AM	Tube furnace set to 0
2/8/2012	11:16:11 AM	Helium valve closed
2/8/2012	11:16:11 AM	BCl3 valve closed
2/8/2012	11:16:11 AM	PH3 valve closed
2/8/2012	11:16:11 AM	SiCl4 pre valve closed
2/8/2012	11:16:11 AM	SiCl4 post valve closed
2/8/2012	11:16:11 AM	Main Vac valve closed
2/8/2012	11:16:11 AM	Bypass valve closed
2/8/2012	11:16:11 AM	H2 valve opened
2/8/2012	11:16:11 AM	Bubbler valve opened
2/8/2012	11:16:11 AM	Helium MFC set to  0.000000
2/8/2012	11:16:11 AM	H2 MFC set to  500.000000
2/8/2012	11:16:11 AM	BCl3 MFC set to  0.000000
2/8/2012	11:16:11 AM	PH3 MFC set to  0.000000
2/8/2012	11:16:11 AM	SiCl4 MFC set to  0.000000
2/8/2012	11:16:11 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	11:16:12 AM	Tube furnace set to 1000
2/8/2012	11:41:12 AM	Helium valve closed
2/8/2012	11:41:12 AM	PH3 valve closed
2/8/2012	11:41:12 AM	Main Vac valve closed
2/8/2012	11:41:12 AM	Bypass valve closed
2/8/2012	11:41:12 AM	H2 valve opened
2/8/2012	11:41:12 AM	BCl3 valve opened
2/8/2012	11:41:12 AM	SiCl4 pre valve opened
2/8/2012	11:41:12 AM	SiCl4 post valve opened
2/8/2012	11:41:12 AM	Bubbler valve opened
2/8/2012	11:41:12 AM	Helium MFC set to  0.000000
2/8/2012	11:41:12 AM	H2 MFC set to  450.000000
2/8/2012	11:41:12 AM	BCl3 MFC set to  1.500000
2/8/2012	11:41:12 AM	PH3 MFC set to  0.000000
2/8/2012	11:41:12 AM	SiCl4 MFC set to  50.000000
2/8/2012	11:41:12 AM	Bypass solenoid MFC set to  0.000000
2/8/2012	11:41:12 AM	Tube furnace set to 1000
2/8/2012	12:06:12 PM	Helium valve closed
2/8/2012	12:06:12 PM	BCl3 valve closed
2/8/2012	12:06:12 PM	PH3 valve closed
2/8/2012	12:06:12 PM	SiCl4 pre valve closed
2/8/2012	12:06:12 PM	SiCl4 post valve closed
2/8/2012	12:06:12 PM	Main Vac valve closed
2/8/2012	12:06:12 PM	Bypass valve closed
2/8/2012	12:06:12 PM	H2 valve opened
2/8/2012	12:06:12 PM	Bubbler valve opened
2/8/2012	12:06:12 PM	Helium MFC set to  0.000000
2/8/2012	12:06:12 PM	H2 MFC set to  500.000000
2/8/2012	12:06:12 PM	BCl3 MFC set to  0.000000
2/8/2012	12:06:12 PM	PH3 MFC set to  0.000000
2/8/2012	12:06:12 PM	SiCl4 MFC set to  0.000000
2/8/2012	12:06:12 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	12:06:12 PM	Tube furnace set to 750
2/8/2012	12:21:12 PM	H2 valve closed
2/8/2012	12:21:12 PM	BCl3 valve closed
2/8/2012	12:21:12 PM	PH3 valve closed
2/8/2012	12:21:12 PM	SiCl4 pre valve closed
2/8/2012	12:21:12 PM	SiCl4 post valve closed
2/8/2012	12:21:12 PM	Main Vac valve closed
2/8/2012	12:21:12 PM	Bypass valve closed
2/8/2012	12:21:12 PM	Helium valve opened
2/8/2012	12:21:12 PM	Bubbler valve opened
2/8/2012	12:21:12 PM	Helium MFC set to  500.000000
2/8/2012	12:21:12 PM	H2 MFC set to  0.000000
2/8/2012	12:21:12 PM	BCl3 MFC set to  0.000000
2/8/2012	12:21:12 PM	PH3 MFC set to  0.000000
2/8/2012	12:21:12 PM	SiCl4 MFC set to  0.000000
2/8/2012	12:21:12 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	12:21:12 PM	Tube furnace set to 0
2/8/2012	12:41:12 PM	Helium valve closed
2/8/2012	12:41:12 PM	H2 valve closed
2/8/2012	12:41:12 PM	BCl3 valve closed
2/8/2012	12:41:12 PM	PH3 valve closed
2/8/2012	12:41:12 PM	SiCl4 pre valve closed
2/8/2012	12:41:12 PM	SiCl4 post valve closed
2/8/2012	12:41:12 PM	Main Vac valve closed
2/8/2012	12:41:12 PM	Bypass valve closed
2/8/2012	12:41:12 PM	Bubbler valve closed
2/8/2012	12:41:12 PM	Helium MFC set to  0.000000
2/8/2012	12:41:12 PM	H2 MFC set to  0.000000
2/8/2012	12:41:12 PM	BCl3 MFC set to  0.000000
2/8/2012	12:41:12 PM	PH3 MFC set to  0.000000
2/8/2012	12:41:12 PM	SiCl4 MFC set to  0.000000
2/8/2012	12:41:12 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	12:41:12 PM	Tube furnace set to 0
2/8/2012	12:56:39 PM	Run aborted at 12:56 PM
2/8/2012	12:56:39 PM	Helium valve closed
2/8/2012	12:56:39 PM	H2 valve closed
2/8/2012	12:56:39 PM	BCl3 valve closed
2/8/2012	12:56:39 PM	PH3 valve closed
2/8/2012	12:56:39 PM	SiCl4 pre valve closed
2/8/2012	12:56:39 PM	SiCl4 post valve closed
2/8/2012	12:56:39 PM	Bypass valve closed
2/8/2012	12:56:39 PM	Main Vac valve closed
2/8/2012	12:56:39 PM	Bubbler valve closed
2/8/2012	12:56:39 PM	Helium MFC set to  0.000000
2/8/2012	12:56:39 PM	H2 MFC set to  0.000000
2/8/2012	12:56:39 PM	BCl3 MFC set to  0.000000
2/8/2012	12:56:39 PM	PH3 MFC set to  0.000000
2/8/2012	12:56:39 PM	SiCl4 MFC set to  0.000000
2/8/2012	12:56:39 PM	Tube furnace set to 0
2/8/2012	12:56:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	12:56:43 PM	Recipe started at 12:56 PM
2/8/2012	12:56:43 PM	Helium valve closed
2/8/2012	12:56:43 PM	H2 valve closed
2/8/2012	12:56:43 PM	BCl3 valve closed
2/8/2012	12:56:43 PM	PH3 valve closed
2/8/2012	12:56:43 PM	SiCl4 pre valve closed
2/8/2012	12:56:43 PM	SiCl4 post valve closed
2/8/2012	12:56:43 PM	Main Vac valve closed
2/8/2012	12:56:43 PM	Bypass valve closed
2/8/2012	12:56:43 PM	Bubbler valve closed
2/8/2012	12:56:43 PM	Helium MFC set to  0.000000
2/8/2012	12:56:43 PM	H2 MFC set to  0.000000
2/8/2012	12:56:43 PM	BCl3 MFC set to  0.000000
2/8/2012	12:56:43 PM	PH3 MFC set to  0.000000
2/8/2012	12:56:43 PM	SiCl4 MFC set to  0.000000
2/8/2012	12:56:43 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	12:56:43 PM	Tube furnace set to 0
2/8/2012	12:56:46 PM	H2 valve closed
2/8/2012	12:56:46 PM	BCl3 valve closed
2/8/2012	12:56:46 PM	PH3 valve closed
2/8/2012	12:56:46 PM	SiCl4 pre valve closed
2/8/2012	12:56:46 PM	SiCl4 post valve closed
2/8/2012	12:56:46 PM	Main Vac valve closed
2/8/2012	12:56:46 PM	Bypass valve closed
2/8/2012	12:56:46 PM	Bubbler valve closed
2/8/2012	12:56:46 PM	Helium valve opened
2/8/2012	12:56:46 PM	Helium MFC set to  500.000000
2/8/2012	12:56:46 PM	H2 MFC set to  0.000000
2/8/2012	12:56:46 PM	BCl3 MFC set to  0.000000
2/8/2012	12:56:46 PM	PH3 MFC set to  0.000000
2/8/2012	12:56:46 PM	SiCl4 MFC set to  0.000000
2/8/2012	12:56:46 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	12:56:46 PM	Tube furnace set to 0
2/8/2012	12:56:50 PM	Helium valve closed
2/8/2012	12:56:50 PM	H2 valve closed
2/8/2012	12:56:50 PM	BCl3 valve closed
2/8/2012	12:56:50 PM	PH3 valve closed
2/8/2012	12:56:50 PM	SiCl4 pre valve closed
2/8/2012	12:56:50 PM	SiCl4 post valve closed
2/8/2012	12:56:50 PM	Main Vac valve closed
2/8/2012	12:56:50 PM	Bypass valve closed
2/8/2012	12:56:50 PM	Bubbler valve closed
2/8/2012	12:56:50 PM	Helium MFC set to  0.000000
2/8/2012	12:56:50 PM	H2 MFC set to  0.000000
2/8/2012	12:56:50 PM	BCl3 MFC set to  0.000000
2/8/2012	12:56:50 PM	PH3 MFC set to  0.000000
2/8/2012	12:56:50 PM	SiCl4 MFC set to  0.000000
2/8/2012	12:56:50 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	12:56:50 PM	Tube furnace set to 0
2/8/2012	12:56:51 PM	Run finished at 12:56 PM
2/8/2012	12:56:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	1:17:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	1:17:59 PM	Recipe started at 1:17 PM
2/8/2012	1:17:59 PM	Helium valve closed
2/8/2012	1:17:59 PM	H2 valve closed
2/8/2012	1:17:59 PM	BCl3 valve closed
2/8/2012	1:17:59 PM	PH3 valve closed
2/8/2012	1:17:59 PM	SiCl4 pre valve closed
2/8/2012	1:17:59 PM	SiCl4 post valve closed
2/8/2012	1:17:59 PM	Main Vac valve closed
2/8/2012	1:17:59 PM	Bypass valve closed
2/8/2012	1:17:59 PM	Bubbler valve closed
2/8/2012	1:17:59 PM	Helium MFC set to  0.000000
2/8/2012	1:17:59 PM	H2 MFC set to  0.000000
2/8/2012	1:17:59 PM	BCl3 MFC set to  0.000000
2/8/2012	1:17:59 PM	PH3 MFC set to  0.000000
2/8/2012	1:17:59 PM	SiCl4 MFC set to  0.000000
2/8/2012	1:17:59 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	1:17:59 PM	Tube furnace set to 0
2/8/2012	1:18:02 PM	H2 valve closed
2/8/2012	1:18:02 PM	BCl3 valve closed
2/8/2012	1:18:02 PM	PH3 valve closed
2/8/2012	1:18:02 PM	SiCl4 pre valve closed
2/8/2012	1:18:02 PM	SiCl4 post valve closed
2/8/2012	1:18:02 PM	Main Vac valve closed
2/8/2012	1:18:02 PM	Bypass valve closed
2/8/2012	1:18:02 PM	Bubbler valve closed
2/8/2012	1:18:02 PM	Helium valve opened
2/8/2012	1:18:02 PM	Helium MFC set to  500.000000
2/8/2012	1:18:02 PM	H2 MFC set to  0.000000
2/8/2012	1:18:02 PM	BCl3 MFC set to  0.000000
2/8/2012	1:18:02 PM	PH3 MFC set to  0.000000
2/8/2012	1:18:02 PM	SiCl4 MFC set to  0.000000
2/8/2012	1:18:02 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	1:18:02 PM	Tube furnace set to 0
2/8/2012	1:18:03 PM	Helium valve closed
2/8/2012	1:18:03 PM	H2 valve closed
2/8/2012	1:18:03 PM	BCl3 valve closed
2/8/2012	1:18:03 PM	PH3 valve closed
2/8/2012	1:18:03 PM	SiCl4 pre valve closed
2/8/2012	1:18:03 PM	SiCl4 post valve closed
2/8/2012	1:18:03 PM	Main Vac valve closed
2/8/2012	1:18:03 PM	Bypass valve closed
2/8/2012	1:18:03 PM	Bubbler valve closed
2/8/2012	1:18:03 PM	Helium MFC set to  0.000000
2/8/2012	1:18:03 PM	H2 MFC set to  0.000000
2/8/2012	1:18:03 PM	BCl3 MFC set to  0.000000
2/8/2012	1:18:03 PM	PH3 MFC set to  0.000000
2/8/2012	1:18:03 PM	SiCl4 MFC set to  0.000000
2/8/2012	1:18:03 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	1:18:03 PM	Tube furnace set to 0
2/8/2012	1:18:04 PM	Run finished at 1:18 PM
2/8/2012	1:18:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	1:25:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2012	1:25:37 PM	Recipe started at 1:25 PM
2/8/2012	1:25:37 PM	Helium valve closed
2/8/2012	1:25:37 PM	H2 valve closed
2/8/2012	1:25:37 PM	BCl3 valve closed
2/8/2012	1:25:37 PM	PH3 valve closed
2/8/2012	1:25:37 PM	SiCl4 pre valve closed
2/8/2012	1:25:37 PM	SiCl4 post valve closed
2/8/2012	1:25:37 PM	Main Vac valve closed
2/8/2012	1:25:37 PM	Bubbler valve closed
2/8/2012	1:25:37 PM	Bypass valve opened
2/8/2012	1:25:37 PM	Helium MFC set to  0.000000
2/8/2012	1:25:37 PM	H2 MFC set to  0.000000
2/8/2012	1:25:37 PM	BCl3 MFC set to  0.000000
2/8/2012	1:25:37 PM	PH3 MFC set to  0.000000
2/8/2012	1:25:37 PM	SiCl4 MFC set to  0.000000
2/8/2012	1:25:37 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	1:25:37 PM	Tube furnace set to 0
2/8/2012	1:26:38 PM	Helium valve closed
2/8/2012	1:26:38 PM	H2 valve closed
2/8/2012	1:26:38 PM	BCl3 valve closed
2/8/2012	1:26:38 PM	PH3 valve closed
2/8/2012	1:26:38 PM	SiCl4 pre valve closed
2/8/2012	1:26:38 PM	SiCl4 post valve closed
2/8/2012	1:26:38 PM	Main Vac valve closed
2/8/2012	1:26:38 PM	Bubbler valve closed
2/8/2012	1:26:38 PM	Bypass valve opened
2/8/2012	1:26:38 PM	Helium MFC set to  0.000000
2/8/2012	1:26:38 PM	H2 MFC set to  0.000000
2/8/2012	1:26:38 PM	BCl3 MFC set to  0.000000
2/8/2012	1:26:38 PM	PH3 MFC set to  0.000000
2/8/2012	1:26:38 PM	SiCl4 MFC set to  0.000000
2/8/2012	1:26:38 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	1:26:38 PM	Tube furnace set to 0
2/8/2012	1:27:39 PM	Helium valve closed
2/8/2012	1:27:39 PM	H2 valve closed
2/8/2012	1:27:39 PM	BCl3 valve closed
2/8/2012	1:27:39 PM	PH3 valve closed
2/8/2012	1:27:39 PM	SiCl4 pre valve closed
2/8/2012	1:27:39 PM	SiCl4 post valve closed
2/8/2012	1:27:39 PM	Bypass valve closed
2/8/2012	1:27:39 PM	Bubbler valve closed
2/8/2012	1:27:39 PM	Main Vac valve opened
2/8/2012	1:27:39 PM	Helium MFC set to  0.000000
2/8/2012	1:27:39 PM	H2 MFC set to  0.000000
2/8/2012	1:27:39 PM	BCl3 MFC set to  0.000000
2/8/2012	1:27:39 PM	PH3 MFC set to  0.000000
2/8/2012	1:27:39 PM	SiCl4 MFC set to  0.000000
2/8/2012	1:27:39 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	1:27:39 PM	Tube furnace set to 0
2/8/2012	1:27:40 PM	Run finished at 1:27 PM
2/8/2012	1:27:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2012	2:50:21 PM	Main Vac valve closed
2/8/2012	2:50:38 PM	Main Vac valve opened
2/8/2012	2:52:20 PM	Recipe started at 2:52 PM
2/8/2012	2:52:20 PM	Helium valve closed
2/8/2012	2:52:20 PM	H2 valve closed
2/8/2012	2:52:20 PM	BCl3 valve closed
2/8/2012	2:52:20 PM	PH3 valve closed
2/8/2012	2:52:20 PM	SiCl4 pre valve closed
2/8/2012	2:52:20 PM	SiCl4 post valve closed
2/8/2012	2:52:20 PM	Main Vac valve closed
2/8/2012	2:52:20 PM	Bypass valve closed
2/8/2012	2:52:20 PM	Bubbler valve closed
2/8/2012	2:52:20 PM	Helium MFC set to  0.000000
2/8/2012	2:52:20 PM	H2 MFC set to  0.000000
2/8/2012	2:52:20 PM	BCl3 MFC set to  0.000000
2/8/2012	2:52:20 PM	PH3 MFC set to  0.000000
2/8/2012	2:52:20 PM	SiCl4 MFC set to  0.000000
2/8/2012	2:52:20 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	2:52:20 PM	Tube furnace set to 0
2/8/2012	2:52:43 PM	Helium valve closed
2/8/2012	2:52:43 PM	H2 valve closed
2/8/2012	2:52:43 PM	BCl3 valve closed
2/8/2012	2:52:43 PM	PH3 valve closed
2/8/2012	2:52:43 PM	SiCl4 pre valve closed
2/8/2012	2:52:43 PM	SiCl4 post valve closed
2/8/2012	2:52:43 PM	Main Vac valve closed
2/8/2012	2:52:43 PM	Bypass valve closed
2/8/2012	2:52:43 PM	Bubbler valve closed
2/8/2012	2:52:43 PM	Helium MFC set to  0.000000
2/8/2012	2:52:43 PM	H2 MFC set to  0.000000
2/8/2012	2:52:43 PM	BCl3 MFC set to  0.000000
2/8/2012	2:52:43 PM	PH3 MFC set to  0.000000
2/8/2012	2:52:43 PM	SiCl4 MFC set to  0.000000
2/8/2012	2:52:43 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	2:52:43 PM	Tube furnace set to 0
2/8/2012	2:52:46 PM	Helium valve closed
2/8/2012	2:52:46 PM	BCl3 valve closed
2/8/2012	2:52:46 PM	PH3 valve closed
2/8/2012	2:52:46 PM	SiCl4 pre valve closed
2/8/2012	2:52:46 PM	SiCl4 post valve closed
2/8/2012	2:52:46 PM	Main Vac valve closed
2/8/2012	2:52:46 PM	Bypass valve closed
2/8/2012	2:52:46 PM	Bubbler valve closed
2/8/2012	2:52:46 PM	H2 valve opened
2/8/2012	2:52:46 PM	Helium MFC set to  0.000000
2/8/2012	2:52:46 PM	H2 MFC set to  500.000000
2/8/2012	2:52:46 PM	BCl3 MFC set to  0.000000
2/8/2012	2:52:46 PM	PH3 MFC set to  0.000000
2/8/2012	2:52:46 PM	SiCl4 MFC set to  0.000000
2/8/2012	2:52:46 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	2:52:46 PM	Tube furnace set to 0
2/8/2012	2:53:52 PM	Helium valve closed
2/8/2012	2:53:52 PM	BCl3 valve closed
2/8/2012	2:53:52 PM	PH3 valve closed
2/8/2012	2:53:52 PM	SiCl4 pre valve closed
2/8/2012	2:53:52 PM	SiCl4 post valve closed
2/8/2012	2:53:52 PM	Main Vac valve closed
2/8/2012	2:53:52 PM	Bypass valve closed
2/8/2012	2:53:52 PM	H2 valve opened
2/8/2012	2:53:52 PM	Bubbler valve opened
2/8/2012	2:53:52 PM	Helium MFC set to  0.000000
2/8/2012	2:53:52 PM	H2 MFC set to  500.000000
2/8/2012	2:53:52 PM	BCl3 MFC set to  0.000000
2/8/2012	2:53:52 PM	PH3 MFC set to  0.000000
2/8/2012	2:53:52 PM	SiCl4 MFC set to  0.000000
2/8/2012	2:53:52 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	2:53:53 PM	Tube furnace set to 0
2/8/2012	2:53:54 PM	Helium valve closed
2/8/2012	2:53:54 PM	BCl3 valve closed
2/8/2012	2:53:54 PM	PH3 valve closed
2/8/2012	2:53:54 PM	SiCl4 pre valve closed
2/8/2012	2:53:54 PM	SiCl4 post valve closed
2/8/2012	2:53:54 PM	Main Vac valve closed
2/8/2012	2:53:54 PM	Bypass valve closed
2/8/2012	2:53:54 PM	H2 valve opened
2/8/2012	2:53:54 PM	Bubbler valve opened
2/8/2012	2:53:54 PM	Helium MFC set to  0.000000
2/8/2012	2:53:54 PM	H2 MFC set to  500.000000
2/8/2012	2:53:54 PM	BCl3 MFC set to  0.000000
2/8/2012	2:53:54 PM	PH3 MFC set to  0.000000
2/8/2012	2:53:54 PM	SiCl4 MFC set to  0.000000
2/8/2012	2:53:54 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	2:53:54 PM	Tube furnace set to 1000
2/8/2012	3:18:54 PM	Helium valve closed
2/8/2012	3:18:54 PM	PH3 valve closed
2/8/2012	3:18:54 PM	Main Vac valve closed
2/8/2012	3:18:54 PM	Bypass valve closed
2/8/2012	3:18:54 PM	H2 valve opened
2/8/2012	3:18:54 PM	BCl3 valve opened
2/8/2012	3:18:54 PM	SiCl4 pre valve opened
2/8/2012	3:18:54 PM	SiCl4 post valve opened
2/8/2012	3:18:54 PM	Bubbler valve opened
2/8/2012	3:18:54 PM	Helium MFC set to  0.000000
2/8/2012	3:18:54 PM	H2 MFC set to  450.000000
2/8/2012	3:18:54 PM	BCl3 MFC set to  1.500000
2/8/2012	3:18:54 PM	PH3 MFC set to  0.000000
2/8/2012	3:18:54 PM	SiCl4 MFC set to  50.000000
2/8/2012	3:18:54 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	3:18:54 PM	Tube furnace set to 1000
2/8/2012	3:43:54 PM	Helium valve closed
2/8/2012	3:43:54 PM	BCl3 valve closed
2/8/2012	3:43:54 PM	PH3 valve closed
2/8/2012	3:43:54 PM	SiCl4 pre valve closed
2/8/2012	3:43:54 PM	SiCl4 post valve closed
2/8/2012	3:43:54 PM	Main Vac valve closed
2/8/2012	3:43:54 PM	Bypass valve closed
2/8/2012	3:43:54 PM	H2 valve opened
2/8/2012	3:43:54 PM	Bubbler valve opened
2/8/2012	3:43:54 PM	Helium MFC set to  0.000000
2/8/2012	3:43:54 PM	H2 MFC set to  500.000000
2/8/2012	3:43:54 PM	BCl3 MFC set to  0.000000
2/8/2012	3:43:54 PM	PH3 MFC set to  0.000000
2/8/2012	3:43:54 PM	SiCl4 MFC set to  0.000000
2/8/2012	3:43:54 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	3:43:54 PM	Tube furnace set to 750
2/8/2012	3:58:54 PM	H2 valve closed
2/8/2012	3:58:54 PM	BCl3 valve closed
2/8/2012	3:58:54 PM	PH3 valve closed
2/8/2012	3:58:54 PM	SiCl4 pre valve closed
2/8/2012	3:58:54 PM	SiCl4 post valve closed
2/8/2012	3:58:54 PM	Main Vac valve closed
2/8/2012	3:58:54 PM	Bypass valve closed
2/8/2012	3:58:54 PM	Helium valve opened
2/8/2012	3:58:54 PM	Bubbler valve opened
2/8/2012	3:58:54 PM	Helium MFC set to  500.000000
2/8/2012	3:58:54 PM	H2 MFC set to  0.000000
2/8/2012	3:58:54 PM	BCl3 MFC set to  0.000000
2/8/2012	3:58:54 PM	PH3 MFC set to  0.000000
2/8/2012	3:58:54 PM	SiCl4 MFC set to  0.000000
2/8/2012	3:58:54 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	3:58:54 PM	Tube furnace set to 0
2/8/2012	4:18:54 PM	Helium valve closed
2/8/2012	4:18:54 PM	H2 valve closed
2/8/2012	4:18:54 PM	BCl3 valve closed
2/8/2012	4:18:54 PM	PH3 valve closed
2/8/2012	4:18:54 PM	SiCl4 pre valve closed
2/8/2012	4:18:54 PM	SiCl4 post valve closed
2/8/2012	4:18:54 PM	Main Vac valve closed
2/8/2012	4:18:54 PM	Bypass valve closed
2/8/2012	4:18:54 PM	Bubbler valve closed
2/8/2012	4:18:54 PM	Helium MFC set to  0.000000
2/8/2012	4:18:54 PM	H2 MFC set to  0.000000
2/8/2012	4:18:54 PM	BCl3 MFC set to  0.000000
2/8/2012	4:18:54 PM	PH3 MFC set to  0.000000
2/8/2012	4:18:54 PM	SiCl4 MFC set to  0.000000
2/8/2012	4:18:54 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	4:18:54 PM	Tube furnace set to 0
2/8/2012	4:19:11 PM	Run aborted at 4:19 PM
2/8/2012	4:19:11 PM	Helium valve closed
2/8/2012	4:19:11 PM	H2 valve closed
2/8/2012	4:19:11 PM	BCl3 valve closed
2/8/2012	4:19:11 PM	PH3 valve closed
2/8/2012	4:19:11 PM	SiCl4 pre valve closed
2/8/2012	4:19:11 PM	SiCl4 post valve closed
2/8/2012	4:19:11 PM	Bypass valve closed
2/8/2012	4:19:11 PM	Main Vac valve closed
2/8/2012	4:19:11 PM	Bubbler valve closed
2/8/2012	4:19:11 PM	Helium MFC set to  0.000000
2/8/2012	4:19:11 PM	H2 MFC set to  0.000000
2/8/2012	4:19:11 PM	BCl3 MFC set to  0.000000
2/8/2012	4:19:11 PM	PH3 MFC set to  0.000000
2/8/2012	4:19:11 PM	SiCl4 MFC set to  0.000000
2/8/2012	4:19:11 PM	Tube furnace set to 0
2/8/2012	4:28:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	4:28:26 PM	Recipe started at 4:28 PM
2/8/2012	4:28:26 PM	Helium valve closed
2/8/2012	4:28:26 PM	H2 valve closed
2/8/2012	4:28:26 PM	BCl3 valve closed
2/8/2012	4:28:26 PM	PH3 valve closed
2/8/2012	4:28:26 PM	SiCl4 pre valve closed
2/8/2012	4:28:26 PM	SiCl4 post valve closed
2/8/2012	4:28:26 PM	Main Vac valve closed
2/8/2012	4:28:26 PM	Bypass valve closed
2/8/2012	4:28:26 PM	Bubbler valve closed
2/8/2012	4:28:26 PM	Helium MFC set to  0.000000
2/8/2012	4:28:26 PM	H2 MFC set to  0.000000
2/8/2012	4:28:26 PM	BCl3 MFC set to  0.000000
2/8/2012	4:28:26 PM	PH3 MFC set to  0.000000
2/8/2012	4:28:26 PM	SiCl4 MFC set to  0.000000
2/8/2012	4:28:26 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	4:28:26 PM	Tube furnace set to 0
2/8/2012	4:28:30 PM	H2 valve closed
2/8/2012	4:28:30 PM	BCl3 valve closed
2/8/2012	4:28:30 PM	PH3 valve closed
2/8/2012	4:28:30 PM	SiCl4 pre valve closed
2/8/2012	4:28:30 PM	SiCl4 post valve closed
2/8/2012	4:28:30 PM	Main Vac valve closed
2/8/2012	4:28:30 PM	Bypass valve closed
2/8/2012	4:28:30 PM	Bubbler valve closed
2/8/2012	4:28:30 PM	Helium valve opened
2/8/2012	4:28:30 PM	Helium MFC set to  500.000000
2/8/2012	4:28:30 PM	H2 MFC set to  0.000000
2/8/2012	4:28:30 PM	BCl3 MFC set to  0.000000
2/8/2012	4:28:30 PM	PH3 MFC set to  0.000000
2/8/2012	4:28:30 PM	SiCl4 MFC set to  0.000000
2/8/2012	4:28:30 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	4:28:30 PM	Tube furnace set to 0
2/8/2012	4:28:34 PM	Helium valve closed
2/8/2012	4:28:34 PM	H2 valve closed
2/8/2012	4:28:34 PM	BCl3 valve closed
2/8/2012	4:28:34 PM	PH3 valve closed
2/8/2012	4:28:34 PM	SiCl4 pre valve closed
2/8/2012	4:28:34 PM	SiCl4 post valve closed
2/8/2012	4:28:34 PM	Main Vac valve closed
2/8/2012	4:28:34 PM	Bypass valve closed
2/8/2012	4:28:34 PM	Bubbler valve closed
2/8/2012	4:28:34 PM	Helium MFC set to  0.000000
2/8/2012	4:28:34 PM	H2 MFC set to  0.000000
2/8/2012	4:28:34 PM	BCl3 MFC set to  0.000000
2/8/2012	4:28:34 PM	PH3 MFC set to  0.000000
2/8/2012	4:28:34 PM	SiCl4 MFC set to  0.000000
2/8/2012	4:28:34 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	4:28:34 PM	Tube furnace set to 0
2/8/2012	4:28:35 PM	Run finished at 4:28 PM
2/8/2012	4:28:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	4:40:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2012	4:40:12 PM	Recipe started at 4:40 PM
2/8/2012	4:40:12 PM	Helium valve closed
2/8/2012	4:40:12 PM	H2 valve closed
2/8/2012	4:40:12 PM	BCl3 valve closed
2/8/2012	4:40:12 PM	PH3 valve closed
2/8/2012	4:40:12 PM	SiCl4 pre valve closed
2/8/2012	4:40:12 PM	SiCl4 post valve closed
2/8/2012	4:40:12 PM	Main Vac valve closed
2/8/2012	4:40:12 PM	Bubbler valve closed
2/8/2012	4:40:12 PM	Bypass valve opened
2/8/2012	4:40:12 PM	Helium MFC set to  0.000000
2/8/2012	4:40:12 PM	H2 MFC set to  0.000000
2/8/2012	4:40:12 PM	BCl3 MFC set to  0.000000
2/8/2012	4:40:12 PM	PH3 MFC set to  0.000000
2/8/2012	4:40:12 PM	SiCl4 MFC set to  0.000000
2/8/2012	4:40:12 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	4:40:13 PM	Tube furnace set to 0
2/8/2012	4:41:16 PM	Helium valve closed
2/8/2012	4:41:16 PM	H2 valve closed
2/8/2012	4:41:16 PM	BCl3 valve closed
2/8/2012	4:41:16 PM	PH3 valve closed
2/8/2012	4:41:16 PM	SiCl4 pre valve closed
2/8/2012	4:41:16 PM	SiCl4 post valve closed
2/8/2012	4:41:16 PM	Main Vac valve closed
2/8/2012	4:41:16 PM	Bubbler valve closed
2/8/2012	4:41:16 PM	Bypass valve opened
2/8/2012	4:41:16 PM	Helium MFC set to  0.000000
2/8/2012	4:41:16 PM	H2 MFC set to  0.000000
2/8/2012	4:41:16 PM	BCl3 MFC set to  0.000000
2/8/2012	4:41:16 PM	PH3 MFC set to  0.000000
2/8/2012	4:41:16 PM	SiCl4 MFC set to  0.000000
2/8/2012	4:41:16 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	4:41:16 PM	Tube furnace set to 0
2/8/2012	4:42:16 PM	Helium valve closed
2/8/2012	4:42:16 PM	H2 valve closed
2/8/2012	4:42:16 PM	BCl3 valve closed
2/8/2012	4:42:16 PM	PH3 valve closed
2/8/2012	4:42:16 PM	SiCl4 pre valve closed
2/8/2012	4:42:16 PM	SiCl4 post valve closed
2/8/2012	4:42:16 PM	Bypass valve closed
2/8/2012	4:42:17 PM	Bubbler valve closed
2/8/2012	4:42:17 PM	Main Vac valve opened
2/8/2012	4:42:17 PM	Helium MFC set to  0.000000
2/8/2012	4:42:17 PM	H2 MFC set to  0.000000
2/8/2012	4:42:17 PM	BCl3 MFC set to  0.000000
2/8/2012	4:42:17 PM	PH3 MFC set to  0.000000
2/8/2012	4:42:17 PM	SiCl4 MFC set to  0.000000
2/8/2012	4:42:17 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	4:42:17 PM	Tube furnace set to 0
2/8/2012	4:42:18 PM	Run finished at 4:42 PM
2/8/2012	4:42:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2012	6:36:07 PM	Main Vac valve closed
2/8/2012	6:36:25 PM	Main Vac valve opened
2/8/2012	6:37:17 PM	Recipe started at 6:37 PM
2/8/2012	6:37:17 PM	Helium valve closed
2/8/2012	6:37:17 PM	H2 valve closed
2/8/2012	6:37:17 PM	BCl3 valve closed
2/8/2012	6:37:17 PM	PH3 valve closed
2/8/2012	6:37:17 PM	SiCl4 pre valve closed
2/8/2012	6:37:17 PM	SiCl4 post valve closed
2/8/2012	6:37:17 PM	Bypass valve closed
2/8/2012	6:37:17 PM	Bubbler valve closed
2/8/2012	6:37:17 PM	Main Vac valve opened
2/8/2012	6:37:17 PM	Helium MFC set to  0.000000
2/8/2012	6:37:17 PM	H2 MFC set to  0.000000
2/8/2012	6:37:17 PM	BCl3 MFC set to  0.000000
2/8/2012	6:37:17 PM	PH3 MFC set to  0.000000
2/8/2012	6:37:17 PM	SiCl4 MFC set to  0.000000
2/8/2012	6:37:17 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	6:37:17 PM	Tube furnace set to 0
2/8/2012	6:37:20 PM	Helium valve closed
2/8/2012	6:37:20 PM	H2 valve closed
2/8/2012	6:37:20 PM	BCl3 valve closed
2/8/2012	6:37:20 PM	PH3 valve closed
2/8/2012	6:37:20 PM	SiCl4 pre valve closed
2/8/2012	6:37:20 PM	SiCl4 post valve closed
2/8/2012	6:37:20 PM	Main Vac valve closed
2/8/2012	6:37:20 PM	Bypass valve closed
2/8/2012	6:37:20 PM	Bubbler valve closed
2/8/2012	6:37:20 PM	Helium MFC set to  0.000000
2/8/2012	6:37:20 PM	H2 MFC set to  0.000000
2/8/2012	6:37:20 PM	BCl3 MFC set to  0.000000
2/8/2012	6:37:20 PM	PH3 MFC set to  0.000000
2/8/2012	6:37:20 PM	SiCl4 MFC set to  0.000000
2/8/2012	6:37:20 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	6:37:20 PM	Tube furnace set to 0
2/8/2012	6:37:23 PM	Helium valve closed
2/8/2012	6:37:23 PM	BCl3 valve closed
2/8/2012	6:37:23 PM	PH3 valve closed
2/8/2012	6:37:23 PM	SiCl4 pre valve closed
2/8/2012	6:37:23 PM	SiCl4 post valve closed
2/8/2012	6:37:23 PM	Main Vac valve closed
2/8/2012	6:37:23 PM	Bypass valve closed
2/8/2012	6:37:23 PM	Bubbler valve closed
2/8/2012	6:37:23 PM	H2 valve opened
2/8/2012	6:37:23 PM	Helium MFC set to  0.000000
2/8/2012	6:37:23 PM	H2 MFC set to  500.000000
2/8/2012	6:37:23 PM	BCl3 MFC set to  0.000000
2/8/2012	6:37:23 PM	PH3 MFC set to  0.000000
2/8/2012	6:37:23 PM	SiCl4 MFC set to  0.000000
2/8/2012	6:37:23 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	6:37:23 PM	Tube furnace set to 0
2/8/2012	6:38:30 PM	Helium valve closed
2/8/2012	6:38:30 PM	BCl3 valve closed
2/8/2012	6:38:30 PM	PH3 valve closed
2/8/2012	6:38:30 PM	SiCl4 pre valve closed
2/8/2012	6:38:30 PM	SiCl4 post valve closed
2/8/2012	6:38:30 PM	Main Vac valve closed
2/8/2012	6:38:30 PM	Bypass valve closed
2/8/2012	6:38:30 PM	H2 valve opened
2/8/2012	6:38:30 PM	Bubbler valve opened
2/8/2012	6:38:30 PM	Helium MFC set to  0.000000
2/8/2012	6:38:30 PM	H2 MFC set to  500.000000
2/8/2012	6:38:30 PM	BCl3 MFC set to  0.000000
2/8/2012	6:38:30 PM	PH3 MFC set to  0.000000
2/8/2012	6:38:30 PM	SiCl4 MFC set to  0.000000
2/8/2012	6:38:30 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	6:38:30 PM	Tube furnace set to 0
2/8/2012	6:38:31 PM	Helium valve closed
2/8/2012	6:38:31 PM	BCl3 valve closed
2/8/2012	6:38:31 PM	PH3 valve closed
2/8/2012	6:38:31 PM	SiCl4 pre valve closed
2/8/2012	6:38:31 PM	SiCl4 post valve closed
2/8/2012	6:38:31 PM	Main Vac valve closed
2/8/2012	6:38:31 PM	Bypass valve closed
2/8/2012	6:38:31 PM	H2 valve opened
2/8/2012	6:38:31 PM	Bubbler valve opened
2/8/2012	6:38:31 PM	Helium MFC set to  0.000000
2/8/2012	6:38:31 PM	H2 MFC set to  500.000000
2/8/2012	6:38:31 PM	BCl3 MFC set to  0.000000
2/8/2012	6:38:31 PM	PH3 MFC set to  0.000000
2/8/2012	6:38:31 PM	SiCl4 MFC set to  0.000000
2/8/2012	6:38:31 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	6:38:31 PM	Tube furnace set to 1000
2/8/2012	7:03:31 PM	Helium valve closed
2/8/2012	7:03:31 PM	PH3 valve closed
2/8/2012	7:03:31 PM	Main Vac valve closed
2/8/2012	7:03:31 PM	Bypass valve closed
2/8/2012	7:03:31 PM	H2 valve opened
2/8/2012	7:03:31 PM	BCl3 valve opened
2/8/2012	7:03:31 PM	SiCl4 pre valve opened
2/8/2012	7:03:31 PM	SiCl4 post valve opened
2/8/2012	7:03:31 PM	Bubbler valve opened
2/8/2012	7:03:31 PM	Helium MFC set to  0.000000
2/8/2012	7:03:31 PM	H2 MFC set to  450.000000
2/8/2012	7:03:31 PM	BCl3 MFC set to  1.500000
2/8/2012	7:03:31 PM	PH3 MFC set to  0.000000
2/8/2012	7:03:31 PM	SiCl4 MFC set to  50.000000
2/8/2012	7:03:31 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	7:03:31 PM	Tube furnace set to 1000
2/8/2012	7:29:31 PM	Helium valve closed
2/8/2012	7:29:31 PM	BCl3 valve closed
2/8/2012	7:29:31 PM	PH3 valve closed
2/8/2012	7:29:31 PM	SiCl4 pre valve closed
2/8/2012	7:29:31 PM	SiCl4 post valve closed
2/8/2012	7:29:31 PM	Main Vac valve closed
2/8/2012	7:29:31 PM	Bypass valve closed
2/8/2012	7:29:31 PM	H2 valve opened
2/8/2012	7:29:31 PM	Bubbler valve opened
2/8/2012	7:29:31 PM	Helium MFC set to  0.000000
2/8/2012	7:29:31 PM	H2 MFC set to  500.000000
2/8/2012	7:29:31 PM	BCl3 MFC set to  0.000000
2/8/2012	7:29:31 PM	PH3 MFC set to  0.000000
2/8/2012	7:29:31 PM	SiCl4 MFC set to  0.000000
2/8/2012	7:29:31 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	7:29:32 PM	Tube furnace set to 750
2/8/2012	7:44:32 PM	H2 valve closed
2/8/2012	7:44:32 PM	BCl3 valve closed
2/8/2012	7:44:32 PM	PH3 valve closed
2/8/2012	7:44:32 PM	SiCl4 pre valve closed
2/8/2012	7:44:32 PM	SiCl4 post valve closed
2/8/2012	7:44:32 PM	Main Vac valve closed
2/8/2012	7:44:32 PM	Bypass valve closed
2/8/2012	7:44:32 PM	Helium valve opened
2/8/2012	7:44:32 PM	Bubbler valve opened
2/8/2012	7:44:32 PM	Helium MFC set to  500.000000
2/8/2012	7:44:32 PM	H2 MFC set to  0.000000
2/8/2012	7:44:32 PM	BCl3 MFC set to  0.000000
2/8/2012	7:44:32 PM	PH3 MFC set to  0.000000
2/8/2012	7:44:32 PM	SiCl4 MFC set to  0.000000
2/8/2012	7:44:32 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	7:44:32 PM	Tube furnace set to 0
2/8/2012	8:04:32 PM	Helium valve closed
2/8/2012	8:04:32 PM	H2 valve closed
2/8/2012	8:04:32 PM	BCl3 valve closed
2/8/2012	8:04:32 PM	PH3 valve closed
2/8/2012	8:04:32 PM	SiCl4 pre valve closed
2/8/2012	8:04:32 PM	SiCl4 post valve closed
2/8/2012	8:04:32 PM	Main Vac valve closed
2/8/2012	8:04:32 PM	Bypass valve closed
2/8/2012	8:04:32 PM	Bubbler valve closed
2/8/2012	8:04:32 PM	Helium MFC set to  0.000000
2/8/2012	8:04:32 PM	H2 MFC set to  0.000000
2/8/2012	8:04:32 PM	BCl3 MFC set to  0.000000
2/8/2012	8:04:32 PM	PH3 MFC set to  0.000000
2/8/2012	8:04:32 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:04:32 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:04:32 PM	Tube furnace set to 0
2/8/2012	8:24:32 PM	Helium valve closed
2/8/2012	8:24:32 PM	H2 valve closed
2/8/2012	8:24:32 PM	BCl3 valve closed
2/8/2012	8:24:32 PM	PH3 valve closed
2/8/2012	8:24:32 PM	SiCl4 pre valve closed
2/8/2012	8:24:32 PM	SiCl4 post valve closed
2/8/2012	8:24:32 PM	Main Vac valve closed
2/8/2012	8:24:32 PM	Bubbler valve closed
2/8/2012	8:24:32 PM	Bypass valve opened
2/8/2012	8:24:32 PM	Helium MFC set to  0.000000
2/8/2012	8:24:32 PM	H2 MFC set to  0.000000
2/8/2012	8:24:32 PM	BCl3 MFC set to  0.000000
2/8/2012	8:24:32 PM	PH3 MFC set to  0.000000
2/8/2012	8:24:32 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:24:32 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:24:32 PM	Tube furnace set to 0
2/8/2012	8:25:16 PM	Helium valve closed
2/8/2012	8:25:16 PM	H2 valve closed
2/8/2012	8:25:16 PM	BCl3 valve closed
2/8/2012	8:25:16 PM	PH3 valve closed
2/8/2012	8:25:16 PM	SiCl4 pre valve closed
2/8/2012	8:25:16 PM	SiCl4 post valve closed
2/8/2012	8:25:16 PM	Main Vac valve closed
2/8/2012	8:25:16 PM	Bubbler valve closed
2/8/2012	8:25:16 PM	Bypass valve opened
2/8/2012	8:25:16 PM	Helium MFC set to  0.000000
2/8/2012	8:25:16 PM	H2 MFC set to  0.000000
2/8/2012	8:25:16 PM	BCl3 MFC set to  0.000000
2/8/2012	8:25:16 PM	PH3 MFC set to  0.000000
2/8/2012	8:25:16 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:25:16 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:25:16 PM	Tube furnace set to 0
2/8/2012	8:26:16 PM	Helium valve closed
2/8/2012	8:26:16 PM	H2 valve closed
2/8/2012	8:26:16 PM	BCl3 valve closed
2/8/2012	8:26:16 PM	PH3 valve closed
2/8/2012	8:26:16 PM	SiCl4 pre valve closed
2/8/2012	8:26:16 PM	SiCl4 post valve closed
2/8/2012	8:26:16 PM	Bypass valve closed
2/8/2012	8:26:16 PM	Bubbler valve closed
2/8/2012	8:26:16 PM	Main Vac valve opened
2/8/2012	8:26:16 PM	Helium MFC set to  0.000000
2/8/2012	8:26:16 PM	H2 MFC set to  0.000000
2/8/2012	8:26:16 PM	BCl3 MFC set to  0.000000
2/8/2012	8:26:16 PM	PH3 MFC set to  0.000000
2/8/2012	8:26:16 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:26:16 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:26:16 PM	Tube furnace set to 0
2/8/2012	8:34:32 PM	Run aborted at 8:34 PM
2/8/2012	8:34:32 PM	Helium valve closed
2/8/2012	8:34:32 PM	H2 valve closed
2/8/2012	8:34:32 PM	BCl3 valve closed
2/8/2012	8:34:32 PM	PH3 valve closed
2/8/2012	8:34:32 PM	SiCl4 pre valve closed
2/8/2012	8:34:32 PM	SiCl4 post valve closed
2/8/2012	8:34:32 PM	Bypass valve closed
2/8/2012	8:34:32 PM	Main Vac valve closed
2/8/2012	8:34:32 PM	Bubbler valve closed
2/8/2012	8:34:32 PM	Helium MFC set to  0.000000
2/8/2012	8:34:32 PM	H2 MFC set to  0.000000
2/8/2012	8:34:32 PM	BCl3 MFC set to  0.000000
2/8/2012	8:34:32 PM	PH3 MFC set to  0.000000
2/8/2012	8:34:32 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:34:32 PM	Tube furnace set to 0
2/8/2012	8:34:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	8:34:39 PM	Recipe started at 8:34 PM
2/8/2012	8:34:39 PM	Helium valve closed
2/8/2012	8:34:39 PM	H2 valve closed
2/8/2012	8:34:39 PM	BCl3 valve closed
2/8/2012	8:34:39 PM	PH3 valve closed
2/8/2012	8:34:39 PM	SiCl4 pre valve closed
2/8/2012	8:34:39 PM	SiCl4 post valve closed
2/8/2012	8:34:39 PM	Main Vac valve closed
2/8/2012	8:34:39 PM	Bypass valve closed
2/8/2012	8:34:39 PM	Bubbler valve closed
2/8/2012	8:34:39 PM	Helium MFC set to  0.000000
2/8/2012	8:34:39 PM	H2 MFC set to  0.000000
2/8/2012	8:34:39 PM	BCl3 MFC set to  0.000000
2/8/2012	8:34:39 PM	PH3 MFC set to  0.000000
2/8/2012	8:34:39 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:34:39 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:34:40 PM	Tube furnace set to 0
2/8/2012	8:34:43 PM	H2 valve closed
2/8/2012	8:34:43 PM	BCl3 valve closed
2/8/2012	8:34:43 PM	PH3 valve closed
2/8/2012	8:34:43 PM	SiCl4 pre valve closed
2/8/2012	8:34:43 PM	SiCl4 post valve closed
2/8/2012	8:34:43 PM	Main Vac valve closed
2/8/2012	8:34:43 PM	Bypass valve closed
2/8/2012	8:34:43 PM	Bubbler valve closed
2/8/2012	8:34:43 PM	Helium valve opened
2/8/2012	8:34:43 PM	Helium MFC set to  500.000000
2/8/2012	8:34:43 PM	H2 MFC set to  0.000000
2/8/2012	8:34:43 PM	BCl3 MFC set to  0.000000
2/8/2012	8:34:43 PM	PH3 MFC set to  0.000000
2/8/2012	8:34:43 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:34:43 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:34:43 PM	Tube furnace set to 0
2/8/2012	8:35:42 PM	Helium valve closed
2/8/2012	8:35:42 PM	H2 valve closed
2/8/2012	8:35:42 PM	BCl3 valve closed
2/8/2012	8:35:42 PM	PH3 valve closed
2/8/2012	8:35:42 PM	SiCl4 pre valve closed
2/8/2012	8:35:42 PM	SiCl4 post valve closed
2/8/2012	8:35:42 PM	Main Vac valve closed
2/8/2012	8:35:42 PM	Bypass valve closed
2/8/2012	8:35:42 PM	Bubbler valve closed
2/8/2012	8:35:42 PM	Helium MFC set to  0.000000
2/8/2012	8:35:42 PM	H2 MFC set to  0.000000
2/8/2012	8:35:42 PM	BCl3 MFC set to  0.000000
2/8/2012	8:35:42 PM	PH3 MFC set to  0.000000
2/8/2012	8:35:42 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:35:42 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:35:42 PM	Tube furnace set to 0
2/8/2012	8:35:43 PM	Run finished at 8:35 PM
2/8/2012	8:35:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	8:37:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	8:37:34 PM	Recipe started at 8:37 PM
2/8/2012	8:37:34 PM	Helium valve closed
2/8/2012	8:37:34 PM	H2 valve closed
2/8/2012	8:37:34 PM	BCl3 valve closed
2/8/2012	8:37:34 PM	PH3 valve closed
2/8/2012	8:37:34 PM	SiCl4 pre valve closed
2/8/2012	8:37:34 PM	SiCl4 post valve closed
2/8/2012	8:37:34 PM	Main Vac valve closed
2/8/2012	8:37:34 PM	Bypass valve closed
2/8/2012	8:37:34 PM	Bubbler valve closed
2/8/2012	8:37:34 PM	Helium MFC set to  0.000000
2/8/2012	8:37:34 PM	H2 MFC set to  0.000000
2/8/2012	8:37:34 PM	BCl3 MFC set to  0.000000
2/8/2012	8:37:34 PM	PH3 MFC set to  0.000000
2/8/2012	8:37:34 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:37:34 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:37:34 PM	Tube furnace set to 0
2/8/2012	8:37:37 PM	H2 valve closed
2/8/2012	8:37:37 PM	BCl3 valve closed
2/8/2012	8:37:37 PM	PH3 valve closed
2/8/2012	8:37:37 PM	SiCl4 pre valve closed
2/8/2012	8:37:37 PM	SiCl4 post valve closed
2/8/2012	8:37:37 PM	Main Vac valve closed
2/8/2012	8:37:37 PM	Bypass valve closed
2/8/2012	8:37:37 PM	Bubbler valve closed
2/8/2012	8:37:37 PM	Helium valve opened
2/8/2012	8:37:37 PM	Helium MFC set to  500.000000
2/8/2012	8:37:37 PM	H2 MFC set to  0.000000
2/8/2012	8:37:37 PM	BCl3 MFC set to  0.000000
2/8/2012	8:37:37 PM	PH3 MFC set to  0.000000
2/8/2012	8:37:37 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:37:37 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:37:37 PM	Tube furnace set to 0
2/8/2012	8:37:38 PM	Helium valve closed
2/8/2012	8:37:38 PM	H2 valve closed
2/8/2012	8:37:38 PM	BCl3 valve closed
2/8/2012	8:37:38 PM	PH3 valve closed
2/8/2012	8:37:38 PM	SiCl4 pre valve closed
2/8/2012	8:37:38 PM	SiCl4 post valve closed
2/8/2012	8:37:38 PM	Main Vac valve closed
2/8/2012	8:37:38 PM	Bypass valve closed
2/8/2012	8:37:38 PM	Bubbler valve closed
2/8/2012	8:37:38 PM	Helium MFC set to  0.000000
2/8/2012	8:37:38 PM	H2 MFC set to  0.000000
2/8/2012	8:37:38 PM	BCl3 MFC set to  0.000000
2/8/2012	8:37:38 PM	PH3 MFC set to  0.000000
2/8/2012	8:37:38 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:37:38 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:37:39 PM	Tube furnace set to 0
2/8/2012	8:37:40 PM	Run finished at 8:37 PM
2/8/2012	8:37:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/8/2012	8:49:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2012	8:49:06 PM	Recipe started at 8:49 PM
2/8/2012	8:49:06 PM	Helium valve closed
2/8/2012	8:49:06 PM	H2 valve closed
2/8/2012	8:49:06 PM	BCl3 valve closed
2/8/2012	8:49:06 PM	PH3 valve closed
2/8/2012	8:49:06 PM	SiCl4 pre valve closed
2/8/2012	8:49:06 PM	SiCl4 post valve closed
2/8/2012	8:49:06 PM	Main Vac valve closed
2/8/2012	8:49:06 PM	Bubbler valve closed
2/8/2012	8:49:06 PM	Bypass valve opened
2/8/2012	8:49:06 PM	Helium MFC set to  0.000000
2/8/2012	8:49:06 PM	H2 MFC set to  0.000000
2/8/2012	8:49:06 PM	BCl3 MFC set to  0.000000
2/8/2012	8:49:06 PM	PH3 MFC set to  0.000000
2/8/2012	8:49:06 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:49:06 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:49:06 PM	Tube furnace set to 0
2/8/2012	8:50:04 PM	Helium valve closed
2/8/2012	8:50:04 PM	H2 valve closed
2/8/2012	8:50:04 PM	BCl3 valve closed
2/8/2012	8:50:04 PM	PH3 valve closed
2/8/2012	8:50:04 PM	SiCl4 pre valve closed
2/8/2012	8:50:04 PM	SiCl4 post valve closed
2/8/2012	8:50:04 PM	Main Vac valve closed
2/8/2012	8:50:04 PM	Bubbler valve closed
2/8/2012	8:50:04 PM	Bypass valve opened
2/8/2012	8:50:04 PM	Helium MFC set to  0.000000
2/8/2012	8:50:04 PM	H2 MFC set to  0.000000
2/8/2012	8:50:04 PM	BCl3 MFC set to  0.000000
2/8/2012	8:50:04 PM	PH3 MFC set to  0.000000
2/8/2012	8:50:04 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:50:04 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:50:05 PM	Tube furnace set to 0
2/8/2012	8:51:05 PM	Helium valve closed
2/8/2012	8:51:05 PM	H2 valve closed
2/8/2012	8:51:05 PM	BCl3 valve closed
2/8/2012	8:51:05 PM	PH3 valve closed
2/8/2012	8:51:05 PM	SiCl4 pre valve closed
2/8/2012	8:51:05 PM	SiCl4 post valve closed
2/8/2012	8:51:05 PM	Bypass valve closed
2/8/2012	8:51:05 PM	Bubbler valve closed
2/8/2012	8:51:05 PM	Main Vac valve opened
2/8/2012	8:51:05 PM	Helium MFC set to  0.000000
2/8/2012	8:51:05 PM	H2 MFC set to  0.000000
2/8/2012	8:51:05 PM	BCl3 MFC set to  0.000000
2/8/2012	8:51:05 PM	PH3 MFC set to  0.000000
2/8/2012	8:51:05 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:51:05 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:51:05 PM	Tube furnace set to 0
2/8/2012	8:51:06 PM	Run finished at 8:51 PM
2/8/2012	8:51:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/8/2012	8:51:34 PM	Recipe started at 8:51 PM
2/8/2012	8:51:34 PM	Helium valve closed
2/8/2012	8:51:34 PM	H2 valve closed
2/8/2012	8:51:34 PM	BCl3 valve closed
2/8/2012	8:51:34 PM	PH3 valve closed
2/8/2012	8:51:34 PM	SiCl4 pre valve closed
2/8/2012	8:51:34 PM	SiCl4 post valve closed
2/8/2012	8:51:34 PM	Bypass valve closed
2/8/2012	8:51:34 PM	Bubbler valve closed
2/8/2012	8:51:34 PM	Main Vac valve opened
2/8/2012	8:51:34 PM	Helium MFC set to  0.000000
2/8/2012	8:51:34 PM	H2 MFC set to  0.000000
2/8/2012	8:51:34 PM	BCl3 MFC set to  0.000000
2/8/2012	8:51:34 PM	PH3 MFC set to  0.000000
2/8/2012	8:51:34 PM	SiCl4 MFC set to  0.000000
2/8/2012	8:51:34 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	8:51:34 PM	Tube furnace set to 0
2/8/2012	10:51:34 PM	Helium valve closed
2/8/2012	10:51:34 PM	H2 valve closed
2/8/2012	10:51:34 PM	BCl3 valve closed
2/8/2012	10:51:34 PM	PH3 valve closed
2/8/2012	10:51:34 PM	SiCl4 pre valve closed
2/8/2012	10:51:34 PM	SiCl4 post valve closed
2/8/2012	10:51:34 PM	Main Vac valve closed
2/8/2012	10:51:34 PM	Bypass valve closed
2/8/2012	10:51:34 PM	Bubbler valve closed
2/8/2012	10:51:34 PM	Helium MFC set to  0.000000
2/8/2012	10:51:34 PM	H2 MFC set to  0.000000
2/8/2012	10:51:34 PM	BCl3 MFC set to  0.000000
2/8/2012	10:51:34 PM	PH3 MFC set to  0.000000
2/8/2012	10:51:34 PM	SiCl4 MFC set to  0.000000
2/8/2012	10:51:34 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	10:51:34 PM	Tube furnace set to 0
2/8/2012	10:51:37 PM	Helium valve closed
2/8/2012	10:51:37 PM	BCl3 valve closed
2/8/2012	10:51:37 PM	PH3 valve closed
2/8/2012	10:51:37 PM	SiCl4 pre valve closed
2/8/2012	10:51:37 PM	SiCl4 post valve closed
2/8/2012	10:51:37 PM	Main Vac valve closed
2/8/2012	10:51:37 PM	Bypass valve closed
2/8/2012	10:51:37 PM	Bubbler valve closed
2/8/2012	10:51:37 PM	H2 valve opened
2/8/2012	10:51:37 PM	Helium MFC set to  0.000000
2/8/2012	10:51:37 PM	H2 MFC set to  500.000000
2/8/2012	10:51:37 PM	BCl3 MFC set to  0.000000
2/8/2012	10:51:37 PM	PH3 MFC set to  0.000000
2/8/2012	10:51:37 PM	SiCl4 MFC set to  0.000000
2/8/2012	10:51:37 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	10:51:38 PM	Tube furnace set to 0
2/8/2012	10:52:44 PM	Helium valve closed
2/8/2012	10:52:44 PM	BCl3 valve closed
2/8/2012	10:52:44 PM	PH3 valve closed
2/8/2012	10:52:44 PM	SiCl4 pre valve closed
2/8/2012	10:52:44 PM	SiCl4 post valve closed
2/8/2012	10:52:44 PM	Main Vac valve closed
2/8/2012	10:52:44 PM	Bypass valve closed
2/8/2012	10:52:44 PM	H2 valve opened
2/8/2012	10:52:44 PM	Bubbler valve opened
2/8/2012	10:52:44 PM	Helium MFC set to  0.000000
2/8/2012	10:52:44 PM	H2 MFC set to  500.000000
2/8/2012	10:52:44 PM	BCl3 MFC set to  0.000000
2/8/2012	10:52:44 PM	PH3 MFC set to  0.000000
2/8/2012	10:52:44 PM	SiCl4 MFC set to  0.000000
2/8/2012	10:52:44 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	10:52:44 PM	Tube furnace set to 0
2/8/2012	10:52:46 PM	Helium valve closed
2/8/2012	10:52:46 PM	BCl3 valve closed
2/8/2012	10:52:46 PM	PH3 valve closed
2/8/2012	10:52:46 PM	SiCl4 pre valve closed
2/8/2012	10:52:46 PM	SiCl4 post valve closed
2/8/2012	10:52:46 PM	Main Vac valve closed
2/8/2012	10:52:46 PM	Bypass valve closed
2/8/2012	10:52:46 PM	H2 valve opened
2/8/2012	10:52:46 PM	Bubbler valve opened
2/8/2012	10:52:46 PM	Helium MFC set to  0.000000
2/8/2012	10:52:46 PM	H2 MFC set to  500.000000
2/8/2012	10:52:46 PM	BCl3 MFC set to  0.000000
2/8/2012	10:52:46 PM	PH3 MFC set to  0.000000
2/8/2012	10:52:46 PM	SiCl4 MFC set to  0.000000
2/8/2012	10:52:46 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	10:52:46 PM	Tube furnace set to 1000
2/8/2012	11:17:46 PM	Helium valve closed
2/8/2012	11:17:46 PM	PH3 valve closed
2/8/2012	11:17:46 PM	Main Vac valve closed
2/8/2012	11:17:46 PM	Bypass valve closed
2/8/2012	11:17:46 PM	H2 valve opened
2/8/2012	11:17:46 PM	BCl3 valve opened
2/8/2012	11:17:46 PM	SiCl4 pre valve opened
2/8/2012	11:17:46 PM	SiCl4 post valve opened
2/8/2012	11:17:46 PM	Bubbler valve opened
2/8/2012	11:17:46 PM	Helium MFC set to  0.000000
2/8/2012	11:17:46 PM	H2 MFC set to  450.000000
2/8/2012	11:17:46 PM	BCl3 MFC set to  1.500000
2/8/2012	11:17:46 PM	PH3 MFC set to  0.000000
2/8/2012	11:17:46 PM	SiCl4 MFC set to  50.000000
2/8/2012	11:17:46 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	11:17:46 PM	Tube furnace set to 1000
2/8/2012	11:43:46 PM	Helium valve closed
2/8/2012	11:43:46 PM	BCl3 valve closed
2/8/2012	11:43:46 PM	PH3 valve closed
2/8/2012	11:43:46 PM	SiCl4 pre valve closed
2/8/2012	11:43:46 PM	SiCl4 post valve closed
2/8/2012	11:43:46 PM	Main Vac valve closed
2/8/2012	11:43:46 PM	Bypass valve closed
2/8/2012	11:43:46 PM	H2 valve opened
2/8/2012	11:43:46 PM	Bubbler valve opened
2/8/2012	11:43:46 PM	Helium MFC set to  0.000000
2/8/2012	11:43:46 PM	H2 MFC set to  500.000000
2/8/2012	11:43:46 PM	BCl3 MFC set to  0.000000
2/8/2012	11:43:46 PM	PH3 MFC set to  0.000000
2/8/2012	11:43:46 PM	SiCl4 MFC set to  0.000000
2/8/2012	11:43:46 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	11:43:46 PM	Tube furnace set to 750
2/8/2012	11:58:46 PM	H2 valve closed
2/8/2012	11:58:46 PM	BCl3 valve closed
2/8/2012	11:58:46 PM	PH3 valve closed
2/8/2012	11:58:46 PM	SiCl4 pre valve closed
2/8/2012	11:58:46 PM	SiCl4 post valve closed
2/8/2012	11:58:46 PM	Main Vac valve closed
2/8/2012	11:58:46 PM	Bypass valve closed
2/8/2012	11:58:46 PM	Helium valve opened
2/8/2012	11:58:46 PM	Bubbler valve opened
2/8/2012	11:58:46 PM	Helium MFC set to  500.000000
2/8/2012	11:58:46 PM	H2 MFC set to  0.000000
2/8/2012	11:58:46 PM	BCl3 MFC set to  0.000000
2/8/2012	11:58:46 PM	PH3 MFC set to  0.000000
2/8/2012	11:58:46 PM	SiCl4 MFC set to  0.000000
2/8/2012	11:58:46 PM	Bypass solenoid MFC set to  0.000000
2/8/2012	11:58:46 PM	Tube furnace set to 0
